Material Surface Properties Modifications by Nonequilibrium Atmospheric Pressure Plasma Processing
Agency / Branch:
DOD / USAF
The proposed research will develop a non-equilibrium plasma source for deposition of thin films on refractory materials at temperatures less then 600K. The developed source will also have the flexibility to surface treat thermally sensitive substrates without damage. Our existing non-equilibrium atmospheric plasma source will be optimized for depositing amorphous SiC and ZrO2 thermal barrier materials. Optical emission spectroscopy of the plasma and characteristics of the deposited films will be used to determine optimum processing conditions for depositing the films. Based on our current technology a commercial scale system will be easily designed to meet different industrial needs (Phase II).
Small Business Information at Submission:
Research Institution Information:
Atmospheric Plasma Solutions
407 Brooks Avenue Raleigh, NC 27607
Number of Employees:
NORTH CAROLINA STATE UNIV.
Campus Box 7907
Raleigh, NC 27695
Nonprofit college or university