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A New Instrument for Quantitive Measurements of High-Ionization Thereshold…

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
36496
Program Year/Program:
1997 / SBIR
Agency Tracking Number:
36496
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
ATOM SCIENCES, INC.
ATOM SCIENCES, INC. 114 RIDGEWAY CTR OAK RIDGE, TN 37830 8810
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1997
Title: A New Instrument for Quantitive Measurements of High-Ionization Thereshold Elements in Nanostructures
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $98,992.00
 

Abstract:

The objective of the project is to develop a new mass spectrometric diagnostic tool that will allow quantitative measurement on a nanometer scale of elements having a high ionization potential, such as hydrogen, carbon, nitrogen, oxygen fluorine, and phosphorous. The proposed work would extend the proven capabilities of laser resonance postionization of sputtered material to enable efficient measurements of high-ionization threshold elements in nanoscale devices. Two advances are required to enable these highly sensitive and selective measurements over tens of nm scales, with essentially no matrix effects: 1) demonstrating effective one-photon resonance ionization for the chosen elements, and 2) removing vibrations and drift from existing instrumentation. Work in Phase I is aimed at developing vacuum ultraviolet laser wavelengths to accomplish the first of these requirements. Assuming successful completion of Phase I and Phase II, the high efficiency (3% to 8% useful yield) and lack of matrix effects characteristic of resonance postionization measurements would allow quantitative measurements of major constituents in extremely small dimensions (e.g., 50 nm x 550 nm x 1 nm), even in dynamic stoichiometries. Measurement of low-concentration constituents, dopants, and impurities could be performed in slightly larger volumes.

Principal Investigator:

Heinrich Arlinghaus
4234831113

Business Contact:

Small Business Information at Submission:

Atom Sciences, Inc.
114 Ridgeway Center Oak Ridge, TN 37830

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No