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Company Information:
Name:
Atomic Precision Systems Inc.
Address:
301 Rosemont Drive
Santa Clara, CA 95051 6420
Santa Clara, CA 95051 6420
Located in HUBZone:
No
Woman-Owned:
No
Minority-Owned:
Yes
URL:
N/A
Phone:
(408) 615-7570
Award Totals:
Award List:
SBIR Phase I: High-Speed Atomic Layer Disposition System for Compound Semiconductor Thin Films
Award Year / Program / Phase:
2007 / SBIR / Phase I
Agency:
NSF
Principal Investigator:
Prasad N. Gadgil, PhD
Award Amount:
$100,000.00
Abstract:
This Small Business Innovation Research Phase I project proposes to develop a high-speed and flexible prototype Atomic Layer Deposition (ALD) system suitable for its adaptation to an in-situ precursor generation and a plasma source to develop novel Gallium Nitride (GaN) thin film processes for… More
SBIR Phase II: High-Speed Atomic Layer Disposition System for Compound Semiconductor Thin Films
Award Year / Program / Phase:
2008 / SBIR / Phase II
Agency:
NSF
Principal Investigator:
Prasad N. Gadgil, PhD
Award Amount:
$499,908.00
Abstract:
The Small Business Innovation Research (SBIR) Phase II project will develop a novel high-speed Atomic Layer Deposition technology comprising an ALD reactor and associated thin film processes for GaN thin films required for fabrication of high-brightness Light Emitting Diode (HBLED). The proposed… More