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Company Information:

Company Name: Atomic Precision Systems Inc.
City: Santa Clara
State: CA
Zip+4: 95051 6420
Woman-Owned: No
Minority-Owned: Yes
HUBZone-Owned: No
Website URL: N/A
Phone: (408) 615-7570

Award Totals:

Program/Phase Award Amount ($) Number of Awards
SBIR Phase I $100,000.00 1
SBIR Phase II $499,908.00 1

Award List:

SBIR Phase I: High-Speed Atomic Layer Disposition System for Compound Semiconductor Thin Films

Award Year / Program / Phase: 2007 / SBIR / Phase I
Agency: NSF
Principal Investigator: Prasad N. Gadgil, PhD
Award Amount: $100,000.00
Abstract:
This Small Business Innovation Research Phase I project proposes to develop a high-speed and flexible prototype Atomic Layer Deposition (ALD) system suitable for its adaptation to an in-situ precursor generation and a plasma source to develop novel Gallium Nitride (GaN) thin film processes for… More

SBIR Phase II: High-Speed Atomic Layer Disposition System for Compound Semiconductor Thin Films

Award Year / Program / Phase: 2008 / SBIR / Phase II
Agency: NSF
Principal Investigator: Prasad N. Gadgil, PhD
Award Amount: $499,908.00
Abstract:
The Small Business Innovation Research (SBIR) Phase II project will develop a novel high-speed Atomic Layer Deposition technology comprising an ALD reactor and associated thin film processes for GaN thin films required for fabrication of high-brightness Light Emitting Diode (HBLED). The proposed… More