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Contamination-free, Ultra-rapid Reactive Chemical Mechanical Polishing (RCMP)…

Award Information

Department of Defense
Missile Defense Agency
Award ID:
Program Year/Program:
2010 / STTR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
MDA 09T001
Solicitation Number:
Small Business Information
Sinmat Inc
1912 NW 67th Place Gainesville, FL -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2010
Title: Contamination-free, Ultra-rapid Reactive Chemical Mechanical Polishing (RCMP) of GaN substrates
Agency / Branch: DOD / MDA
Contract: HQ0006-10-C-7396
Award Amount: $100,000.00


Gallium Nitride (GaN) substrates are ideal materials for fabrication of high-power and high-frequency devices based on III-V materials. The current state-of-the-art Chemical Mechanical Polishing (CMP) methods are plagued by several challenges, including, surface charge affects due to surface contamination, and sub-surface damages, which can limit the quality of III-V devices. Furthermore, there is a need to enhance polishing rates to increase throughput and decrease manufacturing costs. Sinmat Inc., in collaboration with University of Florida proposes to develop a surface contamination-free, Ultra-rapid Reactive Chemical Mechanical Polishing (RCMP) process for the production of epi-ready GaN substrates. This process also facilitates removal of surface/ sub-surface damage that can be detrimental to epitaxial growth. In Phase I we plan to demonstrate the feasibility of this RCMP process for polishing GaN substrates, whereas in Phase II high performance electronic devices will be fabricated on such GaN substrates.

Principal Investigator:

Rajiv K. Singh
Professor of Mat. Sc. & Eng.

Business Contact:

Deepika Singh
President and CEO
Small Business Information at Submission:

Sinmat Inc
2153 Hawthorne Road GTEC Center, Suite 129, Box2 Gainesville, FL 32641

EIN/Tax ID: 593645729
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Research Institution Information:
University of Florida
Material Science & Engineering
PO Box 116400
Gainesville, FL 32611
Contact: Rajiv K. Singh
Contact Phone: 3522467420