This project addresses the problem of measuring upper mid frequency errors (those with periods from 0.5 to 5 mm) on grazing incidence optics. these errors, even with amplitudes of 5 to 50 angstroms rms, have a serious impact on scatter in grazing incidence extreme ultra violet (euv) and x-ray… More

The problem is the fabrication of large aspheric or grazing incidence mirrors. the proposed innovation is a group of eight innovative hardware concepts and mathematicalalgorithms, combined to form a non-contacting, self-referencing, non-interferometric metrology instrument capable of measuring… More

We analyze a new, noncontact approach for sensing the topography of an optic. It offers (1) sub-nanometer accuracy; (2) several mm or more of dynamic range; and (3) accommodation of large surface slopes and structure. We add autofocusing to a focusing distance measuring interferometer to keep the… More

We analyze a new, noncontact approach for sensing the topography of an optic. It offers (1) sub-nanometer accuracy; (2) several mm or more of dynamic range; and (3) accommodation of large surface slopes and structure. We add autofocusing to a focusing distance measuring interferometer to keep the… More

Integration of three proven, non-contact, optical metrology techniques with an emerging new polishing approach in a single machine will enable the rapid production of large aspheric mirrors with nanometer-class overall accuracy, excellent smoothness, and nearly arbitrary radius of curvature (concave… More

We propose to design, build, and test a major new instrument capable of both measuring and polishing the surface of aspheric mirrors up to 1.2 meters in diameter, and up to f-0.5 in speed, either concave or convex. In the successful Phase I proposal, we laid out the instrument to the component… More