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SBIR Phase I: Ge-Free Strained Silicon Via dTCE Bonding (Differential Thermal…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
63684
Program Year/Program:
2003 / SBIR
Agency Tracking Number:
0314300
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Belford Research, Inc.
386 Spanish Wells Road Hilton Head Island, SC 29926
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Woman-Owned: Yes
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2003
Title: SBIR Phase I: Ge-Free Strained Silicon Via dTCE Bonding (Differential Thermal Coefficient of Expansion Bonding)
Agency: NSF
Contract: 0314300
Award Amount: $99,880.00
 

Abstract:

This Small Business Innovation Research (SBIR) Phase I propose to combine the technologies of silicon-on-insulator (SOI) manufacture with strain-inducing wafer bonding to produce Strained-Si On Insulator (SSOI) wafers. Silicon-based devices with silicon/germanium (Si/Ge) heterostructures have been extensively researched and this has lead to the discovery that tensile strained silicon exhibits superior electronic properties. Bi axially strained-silicon devices are currently strained via expensive which is a highly technical heterostructure fabrication process. Tensile strain can be introduced by growing silicon pseudomorphically on to a lattice of larger unit cell, usually an alloy of Ge/Si. In this work, it is hoped that by optimizing Strained-Silicon-on-Insulator will increase carrier mobilities by more than 3 times The anticipated benefits of this technology would yield ultra-fast, mainstream silicon-based electronics, which would effectively be new host materials with speed, and performance would surpass Gallium Arsenate (GaAs). The multi-billion dollar chips industry would benefit would benefit by reducing the costs for a new plant to design technology.

Principal Investigator:

Rona Belford

Business Contact:

Small Business Information at Submission:

Belford Research, Inc.
386 Spanish Wells Road Hilton Head Island, SC 29926

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No