Ultra High Temperature Capacitive Pressure Sensor
To improve the working performance, increase efficiency, reduce cost, and track system health status and failure modes of advanced propulsion systems; miniaturized, robust sensing systems for measuring and monitoring physical parameters, such as pressure, would be highly advantageous. Technical challenges for developing reliable sensing systems lie in extremely harsh working conditions the micro sensors must operate. In addition to high temperatures and pressures, these conditions include oxidation, corrosion, thermal shock, fatigue, fouling, and abrasive wear. High temperature (300-1350oC) capacitive pressure sensors are of particular interest due to their inherent suitability for wireless readout schemes. The objective of this proposed work is to develop a capacitive pressure sensor based on SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures (up to1600
Small Business Information at Submission:
Sporian Microsystems, Inc.
515 Courtney Way, Suite B Lafayette, CO 80026
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