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SBIR Phase I:Microwave Surface-Wave Plasma Source for Large-Area,…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
99153
Program Year/Program:
2010 / SBIR
Agency Tracking Number:
1014309
Solicitation Year:
N/A
Solicitation Topic Code:
AM6
Solicitation Number:
N/A
Small Business Information
Starfire Industries LLC
2109 South Oak Street, Suite 100 Urbana, IL 61820-0914
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2010
Title: SBIR Phase I:Microwave Surface-Wave Plasma Source for Large-Area, High-Throughput, High-Quality Thin-Film Manufacturing for Solar Panels and Semiconductors
Agency: NSF
Contract: 1014309
Award Amount: $150,000.00
 

Abstract:

This Small Business Innovation Research (SBIR) Phase I project aims to develop an innovative microwave surface-wave plasma source for low-cost, large-area, high-throughput conformal thin-film growth. A scalable architecture will be designed to generate high-pressure, low-temperature, narrow-gap, high-density, and damage-free microwave plasmas without the need for external magnetic fields. This project is expected to demonstrate the high-speed and large-area deposition of high-quality hydrogenated nanocrystalline and amorphous silicon thin films for high-efficiency tandem solar cells. The broader/commercial impact of this project will be the potential to provide a new plasma source with high-speed, large-area and high-quality thin film growth for applications in photovoltaic cells and other semiconductor devices. When scaled to large-areas, current Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Plasma-Enhanced Atomic Layer Deposition (PEALD) capacitive systems have limitations due to large transient Radio Frequency (RF) voltages, discharge non-uniformity and generation of arcs and surface defects between two active parallel plates. In this project, a microwave surface-wave plasma source will be developed to overcome these challenges. In addition, Starfire Industries will partner with the Center for Plasma-Material Interactions at the University of Illinois to provide educational opportunities to students.

Principal Investigator:

Brian E. Jurczyk
PhD
7089556691
bjurczyk@starfireindustries.com

Business Contact:

Brian E. Jurczyk
PhD
7089556691
bjurczyk@starfireindustries.com
Small Business Information at Submission:

Starfire Industries
2109 South Oak Street Champaign, IL 61820

EIN/Tax ID: 364430936
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No