USA flag logo/image

An Official Website of the United States Government

SBIR Phase I:Microfabricated CMP Pad Conditioners with Controlled Diamond…

Award Information

National Science Foundation
Award ID:
Program Year/Program:
2010 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Advanced Diamond TechNologies, Inc.
48 E. Belmont Drive Romeoville, IL 60446-1764
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2010
Title: SBIR Phase I:Microfabricated CMP Pad Conditioners with Controlled Diamond Geometrical Protrusions
Agency: NSF
Contract: 1014016
Award Amount: $149,969.00


This Small Business Innovation Research (SBIR) Phase I project aims to develop micro-fabricated diamond Chemical Mechanical Polishing (CMP) pad conditioners as a replacement of traditional grit-based conditioners for semiconductor and optical polishing. This project will utilize Chemical Vapor Deposition (CVD) based ultrananocrystalline diamond technologies to create a narrowly size-distributed and shape-controlled array of protrusions to act as abrasive grit. The resulting monolithic abrasive surface will be able to withstand wear and corrosion in the presence of CMP slurries without loss of abrasive structures. The broader/commercial impact of this project will be the potential to provide new CMP pad conditioners to meet the required precision of CMP process for the 32 nanometer node semiconductor technologies and beyond. In the CMP process, rotating pads combined with chemically-active slurries are used to polish surfaces. For sustained performance, the pads must be periodically re-conditioned using abrasive pad conditioners. As wafer-level structure dimensions approach 10-30 nanometer, current conditioning technology will be inadequate to maintain polishing performance within specifications. In this project, arrays of protrusions with engineered shapes and locations will be developed to be used as pad conditioners. They are expected to dramatically outperform the existing conditioners, demonstrating longer life-spans for pads and conditioners, finer polishing tolerances, increased reliability and predictability of pad conditioners, thus overall improved CMP performance.

Principal Investigator:

Nicolaie Moldovan

Business Contact:

Nicolaie Moldovan
Small Business Information at Submission:

Advanced Diamond Tech.
429 B Weber Road # 286 Romeoville, IL 60446

EIN/Tax ID: 200551423
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No