PROCESSING

SEMICONDUCTING ORGANIC MATERIALS WILL BE TESTED FOR THEIR PROCESSABILITY IN INTEGRATED CIRCUIT MANUFACTURING. THE MATERIALS TO BE TESTED INCLUDE POLYPHENYLENE, POLYPHTHALOCYANINES, POLYACRYLONITRILES, TETRATHIAFULVENE HALIDES, AND POLYSILASTYRENE. THESE MATERIALS, WHEN PROPERLY DOPED, HAVE GOOD ELECTRICAL CONDUCTIVITIES AS WELL AS MAINTAINING EXCELLENT THERMAL STABILITY OF 400 DEG C. RATHER THAN DEVISING NEW CIRCUITS, THE WORK WILL LOOK AT INCORPORATING THE POLYMER INTO EXISTING STATE OF THE ART SILICON TECHNOLOGY. SPECIAL MODERN METALLIZATION TECHNIQUES AND ION ETCHING TECHNIQUES WILL BE EVALUATED WITH THE POLYMERS. PHASE I WILL ALSO FORM THE POLYMERS AS PARTS OF SIMPLE CAPACITORS AND RESISTORS, AND TEST FOR CONDUCTIVITY AND OHMIC CONTACT. TESTS OF THEIR FILM-FORMING CAPABILITY WILL BE EXAMINED AS WELL AS THE ABILITY TO BE PATTERNED BY PHOTOLITHOGRAPHY OR ELECTRON-BEAM LITHOGRAPHY.