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SACRIFICIAL POLYIMIDE MATERIALS FOR THE FABRICATION OF MICROELECTROMECHANICAL…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
11745
Program Year/Program:
1991 / SBIR
Agency Tracking Number:
11745
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Brewer Science Incorporated
2401 BREWER DR ROLLA, MO 65401 7003
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1991
Title: SACRIFICIAL POLYIMIDE MATERIALS FOR THE FABRICATION OF MICROELECTROMECHANICAL DEVICES
Agency: NSF
Contract: N/A
Award Amount: $223,200.00
 

Abstract:

A KEY STEP IN THE FABRICATION OF FREE-STANDING MICROMECHANICAL DEVICES IS OFTEN THE REMOVAL OF A SACRIFICIAL OXIDE LAYER WITH HYDROFLUORIC ACID. AS A RESULT, THIS POWERFUL TECHNIQUE IS LIMITED TO USE ON POLYSILICON AND A FEW HF-RESISTANT METALS. THE GOAL OF THIS WORK IS TO DEMONSTRATE THAT MICRODEVICES CAN BE FASHIONED FROM COMMON METALS SUCH AS ALUMINUM BY REPLACING THE OXIDE LAYER WITH A THERMALLY STABLE POLYMER. WE RECENTLY DEVELOPED A NEW FAMILY OF POLYIMIDE MATERIALS WHICH HAVE ALL THE REQUISITE PROPERTIES TO SERVE AS SACRIFICIAL LAYERS. THESE INCLUDE HIGH GLASS TRANSITION TEMPERATURE, GOOD PLANARIZATION, EXCELLENT THERMAL STABILITY( 400 DEGREES CENTIGRADE), GOOD CHEMICAL AND PLASMARESISTANCE, AND MOST IMPORTANTLY, RAPID SOLUBILITY IN MILD, NONCORROSIVE MEDIA. IN PHASE I, WE WILL USE STANDARD IC PROCESSING TECHNIQUES TOMAKE SIMPLE, FREE-STANDING ALUMINUM DEVICES WITH THE AID OF THESE NEW POLYIMIDE MATERIALS. PHASE II WILL EXTEND THESE EFFORTS TO INCLUDE OTHER METALS AS WELL AS THE PRODUCTION OF MORE SOPHISTICATED DEVICES. DURING THIS SAME TIME, WE WILL DETERMINE HOW POLYMER STRUCTURE AND PROCESSINGCONDITIONS CAN BE ALTERED TO IMPROVE FILM ADHESION, THERMAL STABILITY, THERMAL EXPANSION PROPERTIES, AND WET ETCH RATE. THESE RESULTS WILL BE USED TO DEVELOP A NEW POLYIMIDE PRODUCT WHICH COMPLIMENTS OUR CURRENT ELECTRONIC CHEMICALS BUSINESS.

Principal Investigator:

Terry Brewer
President
0

Business Contact:

Small Business Information at Submission:

Brewer Science Inc.
2401 Hgh-tech Drive Po Box Gg Rolla, MO 65401

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No