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CHEMICALLY AMPLIFIED POSITIVE (CAMP) RESISTS FOR WAVEGUIDE APPLICATIONS

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
27462
Program Year/Program:
1994 / SBIR
Agency Tracking Number:
27462
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Brewer Science Incorporated
2401 BREWER DR ROLLA, MO 65401 7003
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1994
Title: CHEMICALLY AMPLIFIED POSITIVE (CAMP) RESISTS FOR WAVEGUIDE APPLICATIONS
Agency: NSF
Contract: N/A
Award Amount: $65,000.00
 

Abstract:

WAVEGUIDES ARE USED TO TRANSMIT LIGHT THROUGH OPTICAL PROCESSORS. COMBINING THE RESOLUTION POTENTIAL OF DEEP-UV PHOTOLITHOGRAPHY AND THE EXTREME SENSITIVITY/HIGH CONTRAST OF CHEMICALLY AMPLIFIED POSITIVE ACTING (CAMP) RESISTS OFFERS A POTENTIALLY SIMPLE METHOD FOR FABRICATING HIGHLY RESOLVED, POLYMERIC WAVEGUIDES STRUCTURES. CAMP RESISTS CAN BE MATED WITH OTHER CLADDING MATERIALS WITH LOWER REFRACTIVE INDICES TO PROVIDE THE NECESSARY GRADIENT. THE OBJECTIVES OF THIS PROJECT ARE TO OPTIMIZE CAMP RESISTS FOR WAVEGUIDE APPLICATIONS, TO DIRECTLY FABRICATE STRUCTURE USING DEEP-UV EXPOSURE, AND TO CHARACTERIZE THE STRUCTURE'S PERFORMANCE. CAMP RESISTS (THIN FILM) ARE NOTED FOR OUTSTANDING SENSITIVITY, CONTRAST, AND RESOLUTION; BUT THICK FILM PERFORMANCE IS NOT WELL DOCUMENTED. INVESTIGATORS ARE SYNTHESIZING TWO ACID-SENSITIVE POLYMERS POLY(P-T-BUTOXY-CARBONYLOXYSTYRENE) AND POLY(P-T-BUTOXYCARBONYLOXYSTYRENE-SULFONE)} AND TWO PHOTOACID GENERATORS (2,6-DINITROBENZYL TOSYLATE AND TRIPHENYLSULFONIUM TRIFLATE). THE POLYMERS AND PHOTOACID GENERATORS ARE CHEMICALLY CHARACTERIZED; AND FORMULATED RESISTS TESTED FOR THICK FILM APPLICATION PERFORMANCE, DEEP-UV SENSITIVITY, CONTRAST, RESOLUTION, NEAR INFRARED ABSORPTION, AND REFRACTIVE INDEX. RESIST(S) WILL BE MICROMACHINED INTO WAVEGUIDES AND AT LEAST ONE STRUCTURE CHARACTERIZED (OPTICAL LOSS, SEM, REFRACTIVE INDEX).

Principal Investigator:

Jim Meador
3143640300

Business Contact:

Small Business Information at Submission:

Brewer Science Inc.
Po Box Gg Rolla, MO 65401

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No