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High Plasma Etch-Resistant Electron Beam Resists for Sub-150mm Applications

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
46663
Program Year/Program:
1999 / SBIR
Agency Tracking Number:
9860346
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Brewer Science Incorporated
2401 BREWER DR ROLLA, MO 65401 7003
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1999
Title: High Plasma Etch-Resistant Electron Beam Resists for Sub-150mm Applications
Agency: NSF
Contract: 9860346
Award Amount: $99,855.00
 

Abstract:

N/A

Principal Investigator:

Tony Flaim

Business Contact:

Small Business Information at Submission:

Brewer Science Inc
2401 Brewer Drive Rolla, MO 65401

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No