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Novel Wet Developable Materials for DUV Lithography

Award Information

Department of Defense
Missile Defense Agency
Award ID:
Program Year/Program:
2002 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Brewer Science Incorporated
2401 BREWER DR ROLLA, MO 65401 7003
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2002
Title: Novel Wet Developable Materials for DUV Lithography
Agency / Branch: DOD / MDA
Contract: DASG60-02-P-0201
Award Amount: $65,000.00


"Acute competitive pressures to produce ever faster and more complex integrated circuits at diminishing costs continually drive IC manufacturers to find new, improved materials and processes without investing in new equipment sets. Currently in themicroelectronic industry, most equipment sets utilize deep ultraviolet (DUV) lasers in photolithography. One promising avenue to meet this demand for lower cost of ownership in DUV photolithography is the development of new materials to use as wetdevelopable DUV bottom antireflective coatings (BARCs). BARCs are necessary to control reflections of light from the substrate surface when the photoresist is exposed to light. Traditional BARC technology requires a four-step process including anadditional etch step to remove the BARC. In contrast, photolithography with a wet developable BARC requires only three steps because the BARC is removed concurrently with the photoresist. This will not only reduce cost, but also increase manufacturingthroughput because fewer production steps will be required. This new material will meet industry requirements such as low reflectivity, spin bowl compatibility, photoresist compatibility, and patternability. These characteristics will allow easyintegration of wet developable DUV BARCs into current equipment sets without further investment. A wet developable, DUV BARC will greatly reduce the cost of ownership in photolithography. Anticipated savings will

Principal Investigator:

Jody Neef
Principle Investigator

Business Contact:

Norman J. Dobson
Managing Director, R&D
Small Business Information at Submission:

Brewer Science, Inc.
2401 Brewer Drive Rolla, MO 65401

EIN/Tax ID: 431240668
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No