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SBIR Phase I: Bottom Anti-Reflective Coatings - BARCs - for Production of…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
63786
Program Year/Program:
2003 / SBIR
Agency Tracking Number:
0319158
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Brewer Science Incorporated
2401 BREWER DR ROLLA, MO 65401 7003
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2003
Title: SBIR Phase I: Bottom Anti-Reflective Coatings - BARCs - for Production of Advanced Semiconductor Devices by 157 nm Lithography
Agency: NSF
Contract: 0319158
Award Amount: $100,000.00
 

Abstract:

This Small Business Innovation Research Phase I project will develop bottom anti-reflective coatings (BARCs) for production of advanced semiconductor devices by 157 nm lithography . The NSF Phase I technical objectives are to demonstrate the feasibility of potential technical approaches to workable 157nm BARCs. The prototype 157 nm BARCs will be produced and characterized for critical industry requirements such as low reflectivity, fast plasma etching rate, and lithographic performance. At least one prototype will be selected and optimized for use with 157-nm photoresists so that the commercialization will be projected in the Phase II. The 157-nm BARCs developed from the NSF Phase I study will result in a significant step forward for 157-nm lithography technology and contribute to the future of advanced semiconductor devices (integrated circuits) fabrication.

Principal Investigator:

Liu He

Business Contact:

Small Business Information at Submission:

Brewer Science Incorporated
2401 High Tech Drive, Box GG Rolla, MO 65401

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No