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Improve/develop metrology for VLA (very low absorption) Coatings: …

Award Information

Department of Defense
Missile Defense Agency
Award ID:
Program Year/Program:
2002 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Brimrose Corporation of America
19 Loveton Circle Hunt Valley Loveton Center Sparks, MD 21152-9201
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2002
Title: Improve/develop metrology for VLA (very low absorption) Coatings: Interferometer-less Coherent Optical Topographic Mapping Technique With Sub-Nanomet
Agency / Branch: DOD / MDA
Contract: F33615-03-M-5703
Award Amount: $70,000.00


"We present in this proposal an interferometer-less optical topographic mapping technique capable of monitoring, for example, the surface quality of coatings on the optics to be deployed in the ABL program. Unlike crystal monitors that are displaced awayfrom the optic under coating, our proposed remote-sensing technique can directly measure the coating characteristics on the substrate and during the coating/manufacturing processes without pausing and removing the optic out of the coating chamber.Two-dimensional photo-EMF sensor arrays can be developed to monitor the optics surface quality over a wide area, making them especially ideal for diagnosis purposes on large aperture optics used by ABL. Sub-nanosecond response times of the proposedphoto-EMF sensors allow near-instantaneous determination of coating quality which can be used to provide real-time feedback to the coating processes. Successful execution of this proposed program will lead to novel technologies capable of high precision determination of coating thickness and surface flatness. Potential commercial applications range from semiconductor chip fabrication, magnetic diskquality control, mask-less photolithography, as well as optical fiber dispersion characterization for the telecomm industries."

Principal Investigator:

Chen Chia Wang
Senior Scientist

Business Contact:

Diane C. Murray
Contract Coordinator
Small Business Information at Submission:

Brimrose Corp.Of America
5024 Campbell Blvd.,, Suite E Baltimore, MD 21236

EIN/Tax ID: 521210230
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No