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SiC Epitaxial Growth by Halo-hydrocarbon Precursor Growth

Award Information

Agency:
Department of Defense
Branch:
Navy
Award ID:
70463
Program Year/Program:
2004 / STTR
Agency Tracking Number:
N045-029-0200
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
CARACAL INC
1110 LAKE COOK RD STE 167 BUFFALO GROVE, IL -
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2004
Title: SiC Epitaxial Growth by Halo-hydrocarbon Precursor Growth
Agency / Branch: DOD / NAVY
Contract: N00014-04-M-0226
Award Amount: $69,989.00
 

Abstract:

The epitaxial growth of SiC is limited by two main processes; homogeneous nucleation and surface mobility at high growth rates. We propose to investigate the growth of SiC using three different halo-hydrocarbons and two or three different chlorinated Si chemistries and also combine the most promising carbon and silicon chemistries. The goal from phase I is to suggest a suitable chemistry eliminating homogeneous nucleation and furthermore investigate the lower limits in temperature where significantly higher growth rates (> 20 micrometer/h) can be achieved without deteriorating the crystalline quality. Low temperature growth is believed to greatly reduce the impurities leeching out of the hot graphite susceptor and the quartz. Lower temperature processes giving impeccable crystalline quality are thus essential if high voltage (>10kV) power devices are to be made. Another goal of the phase I effort is to suggest a suitable reactor configuration for improved utilization of the proposed chemistry.

Principal Investigator:

Olle Kordina
Senior Vice President
8138427398
olle.kordina@caracalsemi.com

Business Contact:

Rajiv Enand
President and CEO
7242727250
rajiv.enand@caracalsemi.com
Small Business Information at Submission:

CARACAL, INC.
4514 Plummer street Pittsburgh, PA 15201

EIN/Tax ID: 020661036
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Research Institution Information:
University of South Florida
4202 East Fowler Avenue, ENB 118
Tampa, FL 33620
Contact: Stephen Saddow
Contact Phone: (813) 974-4773
RI Type: Nonprofit college or university