Making accurate on wafer measurements of millimeter wave semiconductor devices and circuit elements is a fundamental requirement for the advancement of millimeter wave technology. millimeter wave wafer prove development is required. presently on-wafer probing is available only to 26.5 ghz. however,… More

There is an implicit need for the ability to probe internal nodes in gaas mmic's to facilitate development of these strategically critical components. systems using the electro-optic effect have demonstrated outstanding performance in this application, but these systems are ex-pensive and difficult… More

Making accurate automated on-wafer measurements of millimeter-wave semiconductor devices and circuit elements is a fundamental requirement for the advancement of a millimeter-wave technology. millimeter-wave wafer probe development is required. presently on-wafer probing is available only to 26.5… More

A membrane type wafer probe is proposed which, at the end of phase ii, will achieve transmission of signals from tester to die with low abbrations for a 100 ps risetime. capabilities will include low-impedance ground and power contacts, with lsi-level numbers and densities of signal lines. phase i… More

On-wafer microwave probe measurements have demonstrated their unique performance and productivity gains in semiconductor research, development and production activities. however, device performance continues to outpace our ability to measure at the wafer level. as probe performance continues into… More

Noise parameter measurements of microwave transistors and mmics are best performed with on-wafer, probe systems. two key parameters of these systems is the loss from the input tuner to the device under test (dut), and from the dut to the receiver; this is typically dominated by the wafer probe. this… More

Adaptation of state-of-the-art gigahertz wafer probe technology (wpt) for use in design, troubleshooting, and production of multichip modules (mcms) is proposed. these probes are currently capable of testing semiconductor devices on wafers at frequencies upto 75 ghz. phase i will show the electrical… More

The traceability of on-wafer calibration standards has long been an issue among the microwave measurement community, and the proliferation of new calibration methods, elements, and applications only exacerbates the problem. This diversity in calibration needs has made traceability of a physical… More