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110 GHZ ON-WAFER MEASUREMENTS AND ELEMENT MODELING

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
13206
Program Year/Program:
1990 / SBIR
Agency Tracking Number:
13206
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Cascade Microtech, Inc.
14255 SW BRIGADOON COURT Beaverton, OR 97005
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1990
Title: 110 GHZ ON-WAFER MEASUREMENTS AND ELEMENT MODELING
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $49,961.00
 

Abstract:

ON-WAFER MICROWAVE PROBE MEASUREMENTS HAVE DEMONSTRATED THEIR UNIQUE PERFORMANCE AND PRODUCTIVITY GAINS IN SEMICONDUCTOR RESEARCH, DEVELOPMENT AND PRODUCTION ACTIVITIES. HOWEVER, DEVICE PERFORMANCE CONTINUES TO OUTPACE OUR ABILITY TO MEASURE AT THE WAFER LEVEL. AS PROBE PERFORMANCE CONTINUES INTO MILLIMETER WAVELENGTHS, THE MEASUREMENT CHALLENGE INCREASES. FORMERLY NEGLIGIBLE PROBE CONNECTION PARASITICS GROW IN MAGNITUDE WHILE THE DUT GEOMETRY AND PARASITICS TYPICALLY SHRINK. THIS PROPOSAL ADDRESSES ON-WAFER MILLIMETER-WAVE MEASUREMENT ISSUES TO 110 GHZ IN THE AREAS OF CALIBRATION STANDARD ELEMENTS AND METHODS, FET PATTERNS, S-PARAMETER MEASUREMENT TECHNIQUES AND NOISE PARAMETER MEASUREMENTS. ANTICIPATED BENEFITS/POTENTIAL COMMERCIAL APPLICATIONS - AVAILABILITY OF ON-WAFER SEMICONDUCTOR MEASUREMENT CAPABILITY TO 110 GHZ. KEY WORDS - WAFER, MILLIMETER, PROBE, FET, NOISE, CALIBRATION, S-PARAMETERS, MEASUREMENT.

Principal Investigator:

Keith Jones
5036268245

Business Contact:

Small Business Information at Submission:

Cascade Microtech Inc
14255 Sw Brigadoon Ct Beaverton, OR 97005

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No