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SPUTTERED NEUTRAL MASS SPECTROMETRY FOR THE QUANTITATIVE DEPTH PRO FILING OF…

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
2435
Program Year/Program:
1986 / SBIR
Agency Tracking Number:
2435
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Charles Evans & Associates
301 Chesapeake Drive Redwood City, CA 94063
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1986
Title: SPUTTERED NEUTRAL MASS SPECTROMETRY FOR THE QUANTITATIVE DEPTH PRO FILING OF COMPOUND SEMICONDUCTOR MATERIALS DEVELOPMENT
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $499,000.00
 

Abstract:

THE DEVELOPMENT OF ADVANCED COMPOUND SEMICONDUCTOR MATERIALS FOR THE NEXT GENERATION SEMICONDUCTOR DEVICES WILL INCREASE THE DEMANDS FOR SOPHISTICATED MATERIALS CHARACTERIZATION. ALTHOUGH A VARIETY OF SURFACE AND MICROANALYTICAL TECHNIQUES EXIST FOR CHEMICAL CHARACTERIZATION OF THESE MATERIALS, NO TECHNIQUE YET EXISTS FOR QUANTITATIVE MICROSCALE STOICHIOMETRIC ANALYSES. THE RESEARCH PROPOSED FOR PHASE I WILL EVALUATE AND DEVELOP AN APPROACH FOR THE DIRECT MICROCHARACTERIZATION OF COMPOUND SEMICONDUCTOR STOICHIOMETRY BY SPUTTERED NEUTRAL MASS SPECTROMETRY EMPLOYING ION SPUTTERING TO INTRODUCE ATOMS INTO A PLASMA FOR ELECTRON IMPACT IONIZATION. THUS, THE ATOMS ARE EXCITED IN AN ARGON-BASED PLASMA RATHER THAN IN THE MATERIAL ITSELF, THEREBY CIRCUMVENTING THE "MATRIX EFFECT," WHICH SERIOUSLY COMPLICATES QUANTITATIVE MAJOR CONSTITUENT ANALYSIS. THE GOAL OF PHASE I WILL BE TO DETERMINE THE EFFICACY OF THIS TECHNIQUE AND TO EXAMINE AND EVALUATE INSTRUMENTAL CONFIGURATIONS AS THEY RELATE TO OTHER DEFENSE RELATED MATERIALS CHARACTERIZATION NEEDS. A SUBSEQUENT PHASE II PROGRAM, IF FUNDED, WOULD BE TO DESIGN, ASSEMBLE, AND EVALUATE AN INSTRUMENTAL CONFIGURATION, WHILE PHASE III WILL CARRY THIS INSTRUMENTATION INTO THE COMMERCIAL MARKETPLACE.

Principal Investigator:

Dr David A Reed
4153694567

Business Contact:

Small Business Information at Submission:

Charles Evans & Associates
301 Chesapeake Dr Redwood City, CA 94063

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No