Plasmonic MEMS Sensor Array

Sensor development researchers and engineers have perpetually sought novel methods to reduce sensor size and improve performance. Continued miniaturization of sensors through micromachining has enabled novel applications and introduced new paradigms for engineered systems to interact with the world. The challenge has always been to improve performance while continually reducing size. In the current state-of-the-art, miniaturized sensors are often pushing the limits of physics, fighting against the effects of reduced scale on sensor mechanics. Meanwhile, in unconnected fields of research, physicists and chemists have been exploring methods for phenomenally sensitive detection of chemical and biological substances through controlled utilization of surface plasmons. Significant progress in this field over the past decade has led to tremendous advances in our ability to detect minute changes in physical and chemical properties very near to a nanostructured surface. Despite these advances, the field of plasmonics has largely been focused on chemical and biological detection. It is our contention, however, that plasmonics can serve a viable and effective role in a wide range of sensing needs. By combining the extreme sensitivity of plasmonic coupling with the versatility of micromachined sensing, miniaturization will continue, enabling inroads into new applications.