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AN AUTOMATED SYSTEM FOR THE DEPOSITION OF HIGH T(C) SUPERCONDUCTING THIN FILMS…

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
8444
Program Year/Program:
1988 / SBIR
Agency Tracking Number:
8444
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Corium Industries Inc
602 Country Fair Driee - Ste B Champaign, IL 61821
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1988
Title: AN AUTOMATED SYSTEM FOR THE DEPOSITION OF HIGH T(C) SUPERCONDUCTING THIN FILMS AND OTHER MULTI-COMPONENT OXIDE FILMS
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $49,947.00
 

Abstract:

THE DEVELOPMENT OF HIGH TC SUPERCONDUCTING THIN FILMS WILL HAVE SIGNIFICANT IMPACT ON A LARGE NUMBER OF MODERN TECHNOLOGIES, ESPECIALLY IN THE AREA OF ADVANCED MICROCIRCUITRY. ALTHOUGH SUPERCONDUCTING THIN FILMS HAVE BEEN PREPARED BY A VARIETY OF METHODS, ALL OF THESE METHODS REQUIRE HIGH TEMPERATURE PROCESSING STEPS WHICH ARE INCOMPATIBLE WITH THE PRODUCTION OF HIGH DENSITY MICROCIRCUITRY, AND NONE OF THE METHODS DEVELOPED TO DATE ARE SUFFICIENTLY REPRODUCIBLE FOR LARGE SCALE PRODUCTION TO PERMIT ROUTINE MANUFACTURING OF CHIPS WHICH INCORPORATE SUPERCONDUCTING ELEMENTS. CORIUM INDUSTRIES PROPOSES A PROOF-OF-PRINCIPLE DEMONSTRATION OF A MULTICOMPONENT OXIDE THIN FILM DEPOSITION SYSTEM WHICH ELIMINATES MOST OF THE VARIABLES OF THE DEPOSITION PROCESS AND IN PRINCIPLE CAN BE USED AS THE BASIS OF A TOTALLY AUTOMATED MULTI-COMPONENT OXIDE THIN FILM DEPOSITION SYSTEM. ALTHOUGH THERE ARE A NUMBER OF SUCH OXIDE FILMS WHICH ARE OF SIGNIFICANT TECHNOLOGICAL INTEREST THE HIGH TC SUPERCONDUCTING OXIDE YBA(2)CU(3)O(7-X) WILL BE USED TO DEMONSTRATE OPERATION OF THE SYSTEM. IN THIS CONTEXT, A NUMBER OF STEPS INCLUDING IN-SITU SUBSTRATE PREPARATION, AND DEPOSITION OF DIFFUSION BARRIERS, ELECTRICAL CONTACTS AND ENCAPSULANT MATERIALS TO PROTECT THE FILM FROM DEGRADATION BY CONTACT WITH ATMOSPHERIC MOISTURE WILL BE DEMONSTRATED AS PART OF A SINGLE, FULLY AUTOMATED DEPOSITION CYCLE.

Principal Investigator:

Dr chien-ping ju
2173334233

Business Contact:

Small Business Information at Submission:

Corium Industries Inc
602 Country Fair Driee - Ste B Champaign, IL 61821

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No