Award Year / Program / Phase:
2012 / STTR / Phase I
Agency / Branch:
DOD / NAVY
Research Institution:
University of Michigan
The objective of the proposal is to demonstrate the feasibility of a generic package that provides high vacuum, temperature control and vibration isolation for a wide range of high performance (tactical and navigation grade) micromachined inertial sensors. Inertial sensors (accelerometers and…
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