In-situ Stress and Temperature Optical Monitoring for low-cost heteroepitaxial substrates for HgCdTe infrared detectors.
Agency / Branch:
DOD / ARMY
The feasibility of an in-situ, real-time, non-contact system for optically monitoring temperature in the range 25-800C on Si, GaAs, and CdTe-buffered Si/GaAs substrates will be demonstrated. Real-time measurement of thin-film stress and surface reflectivity during deposition on these substrates, including samples provided by NVESD, will also be developed. Temperature measurement will be performed via band-edge thermometry and blackbody radiation analysis, while stress and reflectivity measurement will be made using an etalon-based multiple laser array approach. Data acquisition will be home-pulse triggered, with provisions made for the non-integer shaft-to-stage rotation ratio of V80H MBE reactors.
Small Business Information at Submission:
k-Space Associates, Inc.
2182 Bishop Circle East Dexter, MI 48130
Number of Employees: