SBIR Phase I: Piezo-Driven Inertial Stages for UHV

Award Information

Agency: National Science Foundation	Branch: N/A	Award ID: 62741	Program Year/Program: 2003 / SBIR
Agency Tracking Number: 0232923	Solicitation Year: N/A	Solicitation Topic Code: N/A	Solicitation Number: N/A

Small Business Information: Dynamic Structures and Materials, LLC
205 Williamson Square Franklin, TN -
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Woman-Owned: No

Minority-Owned: No

HUBZone-Owned: No

Phase 1: Fiscal Year: 2003

Title: SBIR Phase I: Piezo-Driven Inertial Stages for UHV

Agency: NSF

Contract: 0232923

Award Amount: $99,999.00

Abstract:
This Small Business Innovation Research Phase I project will develop a piezoelectric motor-drive with Ultra-High-Vacuum (UHV) compatibility for high-speed driving of positioning platforms. The proposed piezoelectric motor-drive will provide an as-yet unrealized combination of several desirable characteristics: nanometer and sub-nanometer precision; speeds in excess of 500 mm/s; drive capacities in the range of 10's of kilograms; and, ranges of travel in excess of 500 mm. The commercial potential of this concept will provide a revolutionary means for rapid and accurate materials handling for fabrication, inspection, metrology, and packaging of microparts and microsystems.

Principal Investigator:
Jeffrey Paine

Business Contact:

Small Business Information at Submission:

Dynamic Structures and Materials, LLC
205 Williamson Square Franklin, TN 37064

EIN/Tax ID:

DUNS: N/A

Number of Employees:

Woman-Owned: No

Minority-Owned: No

HUBZone-Owned: No