SBIR Phase I: Piezo-Driven Inertial Stages for UHV
This Small Business Innovation Research Phase I project will develop a piezoelectric motor-drive with Ultra-High-Vacuum (UHV) compatibility for high-speed driving of positioning platforms. The proposed piezoelectric motor-drive will provide an as-yet unrealized combination of several desirable characteristics: nanometer and sub-nanometer precision; speeds in excess of 500 mm/s; drive capacities in the range of 10's of kilograms; and, ranges of travel in excess of 500 mm.
The commercial potential of this concept will provide a revolutionary means for rapid and accurate materials handling for fabrication, inspection, metrology, and packaging of microparts and microsystems.
Small Business Information at Submission:
Principal Investigator:Jeffrey Paine
Dynamic Structures and Materials, LLC
205 Williamson Square Franklin, TN 37064
Number of Employees: