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SBIR Phase I: Piezo-Driven Inertial Stages for UHV

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
62741
Program Year/Program:
2003 / SBIR
Agency Tracking Number:
0232923
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Dynamic Structures and Materials, LLC
114 S.E. Parkway Ct., Suite 160 Franklin, TN -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2003
Title: SBIR Phase I: Piezo-Driven Inertial Stages for UHV
Agency: NSF
Contract: 0232923
Award Amount: $99,999.00
 

Abstract:

This Small Business Innovation Research Phase I project will develop a piezoelectric motor-drive with Ultra-High-Vacuum (UHV) compatibility for high-speed driving of positioning platforms. The proposed piezoelectric motor-drive will provide an as-yet unrealized combination of several desirable characteristics: nanometer and sub-nanometer precision; speeds in excess of 500 mm/s; drive capacities in the range of 10's of kilograms; and, ranges of travel in excess of 500 mm. The commercial potential of this concept will provide a revolutionary means for rapid and accurate materials handling for fabrication, inspection, metrology, and packaging of microparts and microsystems.

Principal Investigator:

Jeffrey Paine

Business Contact:

Small Business Information at Submission:

Dynamic Structures and Materials, LLC
205 Williamson Square Franklin, TN 37064

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No