Point Of Use Chlorine Gas Generator For Wafer Fabrication
Agency / Branch:
DOD / DARPA
A point of use generator for chlorine gas production is proposed. The generator would provide ultrahigh purity chlorine which is necessary to enhance the growth rate and decrease the impurity level in silicon oxides for silicon device fabrication. The generator will also eliminate the need for environmentally unacceptable organochlorine compounds which are presently used for oxide growth enhancement. ANTICIPATED BENEFITS: The chlorine generator could provide very high purity gas to enhance silicon oxide growth. This would improve silicon device performance and stability.
Small Business Information at Submission:
Principal Investigator:William Ayers
P.o. Box 160 Princeton, NJ 08542
Number of Employees: