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Point of Use Generation of Hydrogen Selenide for Electronic Device Fabrication

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
26716
Program Year/Program:
1994 / SBIR
Agency Tracking Number:
26716
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Electron Transfer Tech
155 Campus Plaza Edison, NJ 08818
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1994
Title: Point of Use Generation of Hydrogen Selenide for Electronic Device Fabrication
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $59,853.00
 

Abstract:

A point of use generator for hydrogram selenide (H2Se) gas production is proposed. The generator would greatly decrease the safety risk of wafer fabrication with the toxic gas while providing higher purity gas than is now available for semiconductor fabrication. Anticipated Benefits: The H2Se generator would find applications in the production of ZnSe light emitting diodes, CdSe and CdInSe optoelectronic devices, and as a Se doping source for diamond thin films.

Principal Investigator:

William Ayers
6099210070

Business Contact:

Small Business Information at Submission:

Electron Transfer
P.o. Box 160 Princeton, NJ 08542

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No