Point of Use Generation of Hydrogen Selenide for Electronic Device Fabrication
Agency / Branch:
DOD / DARPA
A point of use generator for hydrogram selenide (H2Se) gas production is proposed. The generator would greatly decrease the safety risk of wafer fabrication with the toxic gas while providing higher purity gas than is now available for semiconductor fabrication. Anticipated Benefits: The H2Se generator would find applications in the production of ZnSe light emitting diodes, CdSe and CdInSe optoelectronic devices, and as a Se doping source for diamond thin films.
Small Business Information at Submission:
Principal Investigator:William Ayers
P.o. Box 160 Princeton, NJ 08542
Number of Employees: