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Packaging for Radio Frequency Microelectronic (MEMS) Devices Subjected to Harsh…

Award Information

Agency:
Department of Defense 		Branch:
Army 		Award ID:
62940 		Program Year/Program:
2003 / SBIR
Agency Tracking Number:
A022-1744 		Solicitation Year:
N/A 		Solicitation Topic Code:
N/A 		Solicitation Number:
N/A
Small Business Information
EMAG Technologies, Inc.
775 Technology Dr. Suite 300 Ann Arbor, MI -
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2003
Title: Packaging for Radio Frequency Microelectronic (MEMS) Devices Subjected to Harsh Environments
Agency / Branch: DOD / ARMY
Contract: DAAD19-03-C-002
Award Amount: $70,000.00
 

Abstract:

The objective of this Small Business Innovation Research (SBIR) project is to investigate the development of durable, low-cost, Level 1 packaging schemes for RF MEMS devices so that they can withstand extreme loading (mechanical/thermal) conditions and theharsh environment of the battlefield. Our approach will incorporate design and fabrication of three-dimensional interconnects for low-loss and excellent RF performance along with a hermetic on-wafer packaging architecture utilizing Si micromachining andthermo-compression gold bonding. Such a packaging technique offers the optimal approach to highly integrated multifunctional RF systems. In the Phase I feasibility study, we will conduct a research and development program in order to identify materials andtechnologies for the design of RF MEMS packaging and interconnects such that they will withstand extreme conditions. The research during Phase I will include a theoretical analysis to predict deformation, fracture and failure of both the devices and thepackaging seal as well as experimental verification of some of the concepts proposed. One the major problems with the commercial application of RF MEMS devices is their packaging. The outcome of this SBIR project will herald reliable packaging schemes forRF MEMS systems for both military and commercial communication and sensing systems.

Principal Investigator:

Kazem F. Sabet
President
7349736600
ksabet@emagtechnologies.com

Business Contact:

Kazem F. Sabet
President
7349736600
ksabet@emagtechnologies.com
Small Business Information at Submission:

EMAG TECHNOLOGIES, INC.
1340 Eisenhower Place Ann Arbor, MI 48108

EIN/Tax ID: 383209186
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No