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Tunable, Low Mass, Low Loss, Millimeter Wave, MEMS RF Filters

Award Information

Department of Defense
Air Force
Award ID:
Program Year/Program:
2005 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
EMAG Technologies, Inc.
775 Technology Dr. Suite 300 Ann Arbor, MI -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2005
Title: Tunable, Low Mass, Low Loss, Millimeter Wave, MEMS RF Filters
Agency / Branch: DOD / USAF
Contract: FA8718-05-C-0066
Award Amount: $99,935.00


Emerging military, space and commercial communications systems, are placing a high premium on low-cost, small, light-weight RF electronic components, while at the same time increasing demands for higher functionality. Multiple communications and Radar systems are operating or being designed for the Ka-band (25-40 GHz) and above. This trend necessitates the utilization of high performance RF filters that operate well at that frequency band. In response to the above need, EMAG Technologies in collaboration with Purdue University propose to develop a novel, MEMS tunable high-Q filter. The proposed filter will be comprised of a series of evanescent mode cavities, which will be tuned with the use of a piezoelectric actuator. The proposed architecture requires a number of novel technologies that permit excellent RF performance, limited power consumption, low size and cost, high reliability and space qualification. In addition to that, on-wafer packaging and three-dimensional integration will be utilized for the hermetic sealing of the filters and MEMS varactors. This packaging scheme will be based on EMAG's already developed low-loss, hermetic package for single RF MEMS switches. The completed filter will be fabricated on a silicon wafer, thus allowing its integration with other planar active or passive components.

Principal Investigator:

Alex Margomenos
Senior Research Engineer

Business Contact:

Kazem F. Sabet
Small Business Information at Submission:

1340 Eisenhower Place Ann Arbor, MI 48108

EIN/Tax ID: 383209186
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No