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Sequential Growth of Diamond Thin Films in a Rotating Disc Reactor

Award Information

Agency:
Department of Defense
Branch:
Missile Defense Agency
Award ID:
18121
Program Year/Program:
1992 / SBIR
Agency Tracking Number:
18121
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
EMCORE CORP.
394 Elizabeth Ave. Somerset, NJ 08873
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1992
Title: Sequential Growth of Diamond Thin Films in a Rotating Disc Reactor
Agency / Branch: DOD / MDA
Contract: N/A
Award Amount: $49,942.00
 

Abstract:

Current difficulties in the growth of diamond thin films lie in their metastable characteristic and the requirements of non-equilibrium heteroepitaxial techniques for the single crystal growth. Sequential exposure of reactants using a microwave hydrogen plasma enhanced Atomic Layer Epitaxy (PE-ALE) reactor is proposed to promote two dimensional nucleation. In particular, use of halocarbon species is proposed to investigate the possibility of self-limiting growth of diamond thin films. We will use a movable mechanical barrier to divide the chamber into multiple zones. The zones supply source gas, exited or purging hydrogen. The substrate, constantly rotating beneath the barrier, is alternately exposed to the individual gases. The success of proof of principle will result in the growth of epitaxial diamond films and a novel process technology.

Principal Investigator:

Peter Norris, Phd
9082729090

Business Contact:

Small Business Information at Submission:

Emcore Corp.
35 Elizabeth Ave. Somerset, NJ 08873

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No