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SiC SOI Compliant Substrate for SiC and III-V Nitrides

Award Information

Agency:
Department of Defense
Branch:
Navy
Award ID:
28305
Program Year/Program:
1995 / SBIR
Agency Tracking Number:
28305
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
EMCORE CORP.
394 Elizabeth Ave. Somerset, NJ 08873
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1995
Title: SiC SOI Compliant Substrate for SiC and III-V Nitrides
Agency / Branch: DOD / NAVY
Contract: N/A
Award Amount: $99,999.00
 

Abstract:

The wide band-gap semiconductors SiC and III-V nitrides have been receiving greatly increased attention for high temperature and high power semiconductor devices, and for light emitting devices and laser applications at blue and UV wavelengths. Currently, one of the major hurdles in the development of these technologies is the substrate technology: (a) for SiC, substrates are extremely expensive and available only in small diameter sizes; (b) for the 111-N there is a complete lack of suitable single crystal substrate material which is lattice-matched. Epitaxy on substitute substrates usually results in films with high dislocation density. The SiC SOI structure, which has a very thin film of crystalline cubic 3C-SiC (50 - 1000A) on an insulator layer (SiO2) is a potential candidate for a low cost, large area, high quality compliant substrate. This approach could reduce the dislocation density in the grown films by force the threading dislocations downward towards the compliant oxide layer. In addition, the lattice mismatch for subsequent growth of SiC is eliminated and for GaN is greatly reduced (I%). Combining the formation of the SiC SOI structure and III-V nitride growth by MOCVD technology, a new and effective compliant substrate technology can be developed for these important materials.

Principal Investigator:

Dr. Chong Yuan
9082719090

Business Contact:

Small Business Information at Submission:

Emcore Corp
35 Elizabeth Avenue Somerset, NJ 08873

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No