USA flag logo/image

An Official Website of the United States Government

Three Dimensional Integration of Compound Semiconductor and SOI Integrated…

Award Information

Department of Defense
Missile Defense Agency
Award ID:
Program Year/Program:
2002 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Epitaxial Technologies, LLC
1450 South Rolling Road Baltimore, MD 21227-
View profile »
Woman-Owned: No
Minority-Owned: Yes
HUBZone-Owned: No
Phase 1
Fiscal Year: 2002
Title: Three Dimensional Integration of Compound Semiconductor and SOI Integrated Circuits (BMDO02-214B)
Agency / Branch: DOD / MDA
Contract: DTRA01-02-P-0136
Award Amount: $68,946.00


"Epitaxial Technologies proposes to develop an innovative three dimensional (3-D) monolithic integrated circuits technology that will combine the high-performance capabilities of III-V compounds with the low cost and very large scale integration capabilityof Si chip manufacturing. We will achieve this by investigating various material structure, wafer growth, wafer bonding and fabrication concepts and techniques to enable 3D integration without degrading device and circuit performance.In Phase I, we will investigate the growth, fabrication and testing of a variety of device structures such as HBTs, HEMTs and photodiodes on InP bonded to SOI. During Phase II, we will optimize the epitaxial materials and bonding technology and integratemillimeter wave ICs, photo receivers and sensors with CMOS circuits on bonded SOI substrates. This project will result in several types of products: highly integrated multifunction chips and components, and the wafers for fabricating them. The products will be applicable in most DoD and BMDO weapons systems including multi-domain sensors, mm-wavecameras for battlefield target tracking and identification and secure communications. Civilian applications include advanced synthesizers and integrated transceivers for broadband wireless and wireline telecommunications."

Principal Investigator:

Ayub Fathimulla
Vice President, R&D

Business Contact:

Olaleye A. Aina
Small Business Information at Submission:

Epitaxial Technologies, Llc
1450 South Rolling Road Baltimore, MD 21227

EIN/Tax ID: 522018258
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No