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STUDY OF ANISOTROPIC ROOM TEMPERATURE CH4/H2 PLASMA ETCHING OF INP INGAAS AND…

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
12472
Program Year/Program:
1990 / SBIR
Agency Tracking Number:
12472
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Eti Instrument Systems Inc.
1317 Webster Ave Fort Collins, CO 80524
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1990
Title: STUDY OF ANISOTROPIC ROOM TEMPERATURE CH4/H2 PLASMA ETCHING OF INP INGAAS AND HGCDTE WITH APPLICATIONS TO OPTOELECTRIC DEVICE ...
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $49,806.00
 

Abstract:

N/A

Principal Investigator:

Dr Vladimir Ban
6094521188

Business Contact:

Small Business Information at Submission:

Epitaxx Inc
3490 Us Rte 1 Princenton, NJ 08540

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No