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CMOS-MEMS Microgravity Accelerometer with High-Precision DC Response

Award Information

Agency:
National Aeronautics and Space Administration
Branch:
N/A
Award ID:
74193
Program Year/Program:
2006 / SBIR
Agency Tracking Number:
041111
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Evigia Systems, Inc.
3810 Varsity Drive Ann Arbor, MI -
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 2006
Title: CMOS-MEMS Microgravity Accelerometer with High-Precision DC Response
Agency: NASA
Contract: NNC06CA07C
Award Amount: $599,977.00
 

Abstract:

In this Phase II SBIR project a high-sensitivity low-noise all-silicon CMOS-MEMS accelerometer for quasi-steady measurements of accelerations at sub 1 micro-g levels will be developed. The outcome of the project is a capacitive microaccelerometer with a resolution of 90ng/sqrt-Hz over +/-0.1g range for Type A sensor and 0.8ug/sqrt-Hz over +/-1g for Type B sensor with programmable bandwidth from DC to programmable 0.1Hz-100Hz. The accelerometer module includes integrated low-noise CMOS circuitry with active offset and low-frequency noise cancellation to enable high-precision DC measurements. The high-performance of the sensor is enabled by innovation in both MEMS accelerometer and readout circuit technologies: i) Single-crystalline silicon capacitive accelerometer structure. The device has high sensitivity and low thermo-mechanical noise; ii) Innovative high-yield fabrication process that enables formation of high-sensitivity devices on top of CMOS wafers; iii) New and improved low-noise capacitive sensor readout CMOS circuit. This novel microaccelerometer has several NASA applications including measurement of residual accelerations on spacecraft and ground-based low-gravity facilities.

Principal Investigator:

Navid Yazdi
Principal Investigator
7343021140
nyazdi@evigia.com

Business Contact:

Navid Yazdi
President
7343021140
nyazdi@evigia.com
Small Business Information at Submission:

Evigia Systems, Inc.
P.O. box 130285 Ann Arbor, MI 48113

EIN/Tax ID: 201176782
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No