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CMOS-MEMS Microgravity Accelerometer with High-Precision DC Response
- Small Business Information
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Woman-Owned: NoMinority-Owned: NoHUBZone-Owned: No
- Phase 1
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Fiscal Year: 2005Title: CMOS-MEMS Microgravity Accelerometer with High-Precision DC ResponseAgency: NASAContract: NNC05CA35CAward Amount: $69,963.00
Abstract:
This Phase I SBIR effort initiates development of a high-sensitivity low-noise all-silicon CMOS-MEMS accelerometer for quasi-steady measurements of accelerations at sub 1 micro-g levels. The accelerometer module includes integrated low-noise CMOS circuitry with active offset and low-frequency noise cancellation to enable high-precision DC measurements. The high-performance of the sensor is enabled by innovation in both MEMS accelerometer and readout circuit technologies: i) Single-crystalline silicon capacitive accelerometer structure. The device has high sensitivity and low thermo-mechanical noise; ii) Innovative high-yield fabrication process that enables formation of high-sensitivity devices on top of CMOS wafers; iii) New and improved low-noise capacitive sensor readout CMOS circuit. This novel microaccelerometer has several NASA applications including measurement of residual accelerations on spacecraft and ground-based low-gravity facilities.Small Business Information at Submission:Evigia Systems, Inc.
2805 Windwood Dr. #10 Ann Arbor, MI 48105EIN/Tax ID: 201176782DUNS: N/ANumber of Employees:Woman-Owned: NoMinority-Owned: NoHUBZone-Owned: No
Award Information
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Agency: National Aeronautics and Space Administration |
Branch: N/A |
Award ID: 74193 |
Program Year/Program: 2005 / SBIR |
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Agency Tracking Number: 041111 |
Solicitation Year: N/A |
Solicitation Topic Code: N/A |
Solicitation Number: N/A |