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CMOS-MEMS Microgravity Accelerometer with High-Precision DC Response

Award Information

Agency:
National Aeronautics and Space Administration
Branch:
N/A
Award ID:
74193
Program Year/Program:
2005 / SBIR
Agency Tracking Number:
041111
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Evigia Systems, Inc.
3810 Varsity Drive Ann Arbor, MI -
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2005
Title: CMOS-MEMS Microgravity Accelerometer with High-Precision DC Response
Agency: NASA
Contract: NNC05CA35C
Award Amount: $69,963.00
 

Abstract:

This Phase I SBIR effort initiates development of a high-sensitivity low-noise all-silicon CMOS-MEMS accelerometer for quasi-steady measurements of accelerations at sub 1 micro-g levels. The accelerometer module includes integrated low-noise CMOS circuitry with active offset and low-frequency noise cancellation to enable high-precision DC measurements. The high-performance of the sensor is enabled by innovation in both MEMS accelerometer and readout circuit technologies: i) Single-crystalline silicon capacitive accelerometer structure. The device has high sensitivity and low thermo-mechanical noise; ii) Innovative high-yield fabrication process that enables formation of high-sensitivity devices on top of CMOS wafers; iii) New and improved low-noise capacitive sensor readout CMOS circuit. This novel microaccelerometer has several NASA applications including measurement of residual accelerations on spacecraft and ground-based low-gravity facilities.

Principal Investigator:

Navid Yazdi
Principal Investigator
7343021140
nyazdi@evigia.com

Business Contact:

Navid Yazdi
Business Official
7343021140
nyazdi@evigia.com
Small Business Information at Submission:

Evigia Systems, Inc.
2805 Windwood Dr. #10 Ann Arbor, MI 48105

EIN/Tax ID: 201176782
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No