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sbir phase i: Advanced Voltage Contrast Microscopy for Inspection of…

Award Information

National Science Foundation
Award ID:
Program Year/Program:
2002 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Fm Technologies, Inc.
4431-H Brookfield Corporate Dr Chantilly, VA 20151-1691
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2002
Title: sbir phase i: Advanced Voltage Contrast Microscopy for Inspection of Integrated Circuit Devices
Agency: NSF
Contract: N/A
Award Amount: $100,000.00


This Small Business Innovation Research (SBIR) Phase I project was motivated by the need for rapid in-line inspection of quality of nanometer-scale devices in a production environment. An efficient diagnostics instrument, like the proposed product, is a rudimentary requirement for improved business operation in related industries minimizing possibilities for loss of revenue. The proposed innovative approach aims at developing an integrated technology using both electron and ion beams. Unique to this work is the idea of incorporating very special merits of high-brightness negative ion beams in a critical technology for device inspection. A novel system will be built to (i) deliver high yield in device inspection, (ii) achieve nm-level resolution and (iii) insure device integrity. This research will identify the characteristics of appropriate ion species from proof-of-principles experiments. Application of this work would be the design and development of an optimized ion beam column for the microelectronics industry. The end product would be an integrated product with improved optical characteristics.

Principal Investigator:

Samar Guharay

Business Contact:

Small Business Information at Submission:

FM Technologies Inc
10529-B Braddock Road Fairfax, VA 22032

Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No