THE COOLING OF HIGH INTENSITY ELECTRODELESS BULBS

FUSION SYSTEMS CORPORATION HAS BEEN VERY SUCCESSFUL IN DESIGNING AND MANUFACTURING UNIQUE MICROWAVE POWERED ELECTRODELESS UV LIGHT SOURCES FOR INDUSTRIAL APPLICATIONS WORLDWIDE. THE MOST SERIOUS LIMITATION TO EXTENDING THE TECHNOLOGY TO SMALL HIGH INTENSITY SPHERICAL LAMPS IS APPROPRIATE COOLING. IF PROGRESS CAN BE MADE IN THIS AREA, THEN APPLICATIONS SUCH AS STEP AND REPEAT MICROLITHOGRAPHY OF INTEGRATED CIRCUITS CAN BE EXTENDED BELOW PRESENT LIMITS. THE PRESENT COMPANY HAS DONE EXTENSIVE EXPERIMENTATION AND SUPPORTED BASIC RESEARCH AT A UNIVERSITY (VPI & SU) ON THE TOPIC OF JET COOLING. IT APPEARS POSSIBLE TO REDUCE THE DIAMETER OF ELECTRODELESS BULBS AND INCREASE THE POWER DENSITY, BUT COOLING SEVERELY LIMITS THE DESIGN. IN PHASE I OF THIS WORK IT IS PROPOSED TO EXAMINE THE BASIC NATURE OF THE PHYSICAL MECHANISMS INVOLVED IN JET COOLING OF SPHERES. TESTS WILL THEN BE CONDUCTED TO EVALUATE THE EFFECTIVENESS OF TECHNIQUES LIKE ACOUSTIC EXCITATION, OR PASSIVE CONTROLS FOR SPREADING THE JETS, INCREASING THE OVERALL MIXING AND THEREBY THE RATE OF HEAT TRANSFER.