Principal Investigator:
Dr. Gershon M. Goldberg
Award Amount:
$190,000.00
The feasibility of an all-dry lithographic system based on the sislsesquioxanes is examined. these are a class of 3-dimensional organosilicon polymers that can be vacuum deposited on silicon, exposed by e-beams, x-rays, or uv light and developed to a fine line relief image simply by heating. the…
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