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THz and Sub-THz MEMS-Fabricated Klystron Amplifier

Award Information

Department of Defense
Award ID:
Program Year/Program:
2009 / STTR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Army 09-016
Solicitation Number:
Small Business Information
2900 South Main Street Salt Lake City, UT -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2009
Title: THz and Sub-THz MEMS-Fabricated Klystron Amplifier
Agency / Branch: DOD / ARMY
Contract: W911NF-09-C-0142
Award Amount: $100,000.00


InnoSys and Purdue University propose to research and develop robust designs for building, implementing and demonstrating a new class of terahertz (THz) vacuum electronic device (VED) power amplifiers and power sources at frequencies in the range of 0.3-3.0 THz (the so-called THz regime) employing advanced micro electro mechanical system (MEMS) technology and processes. There is significant interest in exploiting the THz regime, however, to date there is a lack of THz power sources to so with. The design, implementation and demonstration of this new class of microfabricated VEDs is the core of our response to this STTR solicitation. More specifically, electron gun, radio frequency (RF) slow wave structure, collector, and thermal management of the THz VED will be integrated and fabricated with a combination of MEMS-fabrication processes, including photolithography, deep reactive ion etching, and wafer bonding with sub-micron alignment tolerances. For this STTR program, InnoSys in cooperation with its research institute partner, Purdue University, will address the lack of powerful, compact and tunable sources of terahertz radiation by combining comprehensive simulations with state-of the art MEMS fabrication and 3-dimensional integration to realize a new class of high power THz VED power amplifiers and sources.

Principal Investigator:

Larry Sadwick

Business Contact:

Jennifer Hwu
Small Business Information at Submission:

2900 South Main Street Salt Lake City, UT 84115

EIN/Tax ID: 870657193
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Research Institution Information:
Purdue University
155 S. Grant Street
West Lafayette, IN 47907
Contact: Deborah Horton
Contact Phone: (765) 496-2393
RI Type: Nonprofit college or university