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Company Information:

Company Name: Inpria Corporation
City: Corvallis
State: OR
Zip+4: 97330-5510
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Website URL: N/A
Phone: (541) 913-9870

Award Totals:

Program/Phase Award Amount ($) Number of Awards
SBIR Phase I $250,000.00 2
SBIR Phase II $1,000,000.00 2

Award List:

SBIR Phase I: Inorganic Electron Beam Resist for High Throughput Nanolithography

Award Year / Program / Phase: 2009 / SBIR / Phase I
Agency: NSF
Principal Investigator: Andrew Grenville, PhD
Award Amount: $100,000.00
Abstract:
This Small Business Innovation Research Phase I project will assess the technical feasibility of developing a robust, high-speed inorganic electron-beam resist platform that will enable the manufacture of electronic devices with feature sizes < 30 nm. The requirements of high speed, low line-width… More

SBIR Phase II:Directly Patternable Inorganic Hardmask for Nanolithography

Award Year / Program / Phase: 2010 / SBIR / Phase II
Agency: NSF
Principal Investigator: Andrew Grenville
Award Amount: $500,000.00
Abstract:
This Small Business Innovation Research (SBIR) Phase II project aims to develop a robust, high-speed inorganic resist platform to revolutionize the manufacture of semiconductor devices with feature sizes < 30 nm. At present, there is no demonstrated organic or inorganic resist that satisfies all of… More

SBIR Phase I:Aqueous Inks for High Performance Oxide Electronics

Award Year / Program / Phase: 2010 / SBIR / Phase I
Agency: NSF
Principal Investigator: Andrew Grenville, PhD
Award Amount: $150,000.00
Abstract:
This Small Business Innovation Research (SBIR) Phase I project aims to develop semiconductor and dielectric inks for thin-film transistor devices to drive Active Matrix organic light-emitting diode (AMOLED) displays. The approach is to employ novel aqueous-based inorganic precursors with low energy… More

SBIR Phase II: Aqueous Precursors for High Performance Metal Oxide Thin Films

Award Year / Program / Phase: 2012 / SBIR / Phase II
Agency: NSF
Principal Investigator: Andrew Grenville
Award Amount: $500,000.00
Abstract:
This Small Business Innovation Research (SBIR) Phase II project aims to develop spin-coatable liquid precursors for extremely high etch resistance pattern transfer layers (hardmasks) to enable novel devices in advanced integrated circuit manufacturing. The approach is to employ the fully inorganic… More