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SBIR Phase I: High Power Pulsed Fiber Laser for EUV Lithography

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
91174
Program Year/Program:
2009 / SBIR
Agency Tracking Number:
0945648
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Arbor Photonics, Inc.
251 Jackson Plaza Unit A1 Ann Arbor, MI -
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2009
Title: SBIR Phase I: High Power Pulsed Fiber Laser for EUV Lithography
Agency: NSF
Contract: 0945648
Award Amount: $144,444.00
 

Abstract:

This Small Business Innovation Research Phase I project will establish the feasibility of a power scalable, short pulse fiber laser that is suitable for use in Extreme UV Lithography (EUVL). A power scalable solution is proposed here, based on fiber lasers using Chirally-Coupled Core (3C) fiber that is 3X more energy efficient and dramatically more compact than competing alternatives. 3C fiber enables single-mode optical output from fibers with core diameters much larger than conventional double-clad fiber. Successful completion of this project would provide a technology to extend photolithography for feature sizes below 22 nanometers. Currently available laser technology can deliver only one third of the power required for high volume manufacturing by EUVL. Source laser power scaling is a key enabler for high volume manufacturing with EUVL and hence the production of semiconductor integrated circuits (ICs) that are smaller, more powerful and more energy efficient.

Principal Investigator:

Thomas Sosnowski
PhD
7342551338
tsoz@arborphotonics.com

Business Contact:

Thomas Sosnowski
PhD
7342551338
tsoz@arborphotonics.com
Small Business Information at Submission:

Arbor Photonics
251 Jackson Plaza Unit A1 Ann Arbor, MI 48103

EIN/Tax ID: 260631617
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No