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IN SITU PARTICLE SENSOR FOR MICROELECTRONIC MANUFACTURING PROCESSES

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
8728
Program Year/Program:
1988 / SBIR
Agency Tracking Number:
8728
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Insitec, Inc.
2110 Omega Road Suite D San Ramon, CA 94583
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1988
Title: IN SITU PARTICLE SENSOR FOR MICROELECTRONIC MANUFACTURING PROCESSES
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $49,049.00
 

Abstract:

REAL TIME, ON-LINE PARTICLE CONTAMINATION SENSORS FOR MICROELECTRONIC MANUFACTURING IN PROCESS EQUIPMENT ENVIRONMENTS HAVE THE POTENTIAL TO IMPROVE CHIP YIELDS THROUGH IMPROVED PROCESS CONTROL. CURRENT MICROELECTRONIC MANUFACTURING MONITORS ARE LIMITED TO LOW EFFICIENCY SAMPLING RATES AND GENERAL CLEAN-ROOM MONITORING DURING THE PRODUCTION PROCESS. PRESENTLY THERE IS NO ON-LINE SENSOR CAPABLE OF QUANTITATIVELY ASSESSING LOCAL PARTICLE CONTAMINATION DURING SHORT TIME CHANGES IN THE PROCESS ENVIRONMENT, E.G. GAS PURGING, CHEMICAL VAPOR DEPOSITION, ETC. WE PROPOSE TO DEVELOP AN IN-SITU PARTICLE MONITOR WHICH EXTENDS THE CAPABILITIES OF CURRENT CLEAN-ROOM PARTICLE COUNTER TECHNOLOGY TO RAPID MEASUREMENTS OF SUBMICRON PARTICLE SIZE AND LOW CONCENTRATION CONTAMINANTS IN MICROELECTRONIC PROCESSING EQUIPMENT.

Principal Investigator:

Dr donald j holve
4158371330

Business Contact:

Small Business Information at Submission:

Insitec
2110 Omega Rd - Ste F San Ramon, CA 94583

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No