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A Micromachined Coriolis-Based Flowmeter for Direct Mass Flow and Fluid Densitv…

Award Information

Department of Defense
Defense Advanced Research Projects Agency
Award ID:
Program Year/Program:
1997 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Integrated Sensing Systems Incorporated
391 Airport Industrial Drive Ypsilanti, MI 48198-7812
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 2
Fiscal Year: 1997
Title: A Micromachined Coriolis-Based Flowmeter for Direct Mass Flow and Fluid Densitv Measurement
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $750,000.00


This Small Business Innovation Research Phase I project proposes a novel, proprietary, micromachined, Coriolis-based, mass flowmeter. This flowmeters possesses many desirable features, including: significantly lower cost, direct mass flow measurement, direct fluid density measurement, small sensor size, low power consumption, measurement of low mass flow rates, high sensitivity, high accuracy fast response time, small fluid flow volume, simple fabrication process, batch fabrication capability, excellent stability, and compatibility with on-chip electronics. In addition, since this device measures mass flow directly, it is not sensitive to fluid conditions, such as temperature, pressure, density, viscosity, and conductivity. Furthermore, unlike thermally-based mass flowmeters, this devices does not generate heat or local high temperature points in the environment under measurement, making it suitable for applications such as fuel monitoring for combustible engines. This device can replace many conventional mass flowmeters used in applications such as semiconductor manufacturing. Furthermore, due to its small size and low power consumption, this device is also best suited for both portable, and battery-operated applications. The major objectives of Phase I are (1) to design and fabricate prototype devices and, (2) to characterize and test them. Achieving these objectives is necessary in order to prove the technical feasibility of this new concept. Anticipated Benefits: Because of its sought-after features, this device has the capability of capturing many existing markets, as well as creating new markets, including, aerospace, defense, active control systems for combustible engines, portable personal health monitors, wearable soldier monitoring systems, miniature weather monitoring stations, microinstrumentation clusters, biomedical, automotive, industrial, building industry, and manufacturing/processing applications.

Principal Investigator:

Nader Najafi

Business Contact:

Small Business Information at Submission:

Integrated Sensing Systems,
P.O. Box 130783 Ann Arbor, MI 48108

Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No