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MEMS-Based Capacitive Pressure Sensors with Self-Calibration Capability

Award Information

Department of Defense
Award ID:
Program Year/Program:
2006 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Intelligent Automation, Inc.
15400 Calhoun Drive Suite 400 Rockville, MD 20855-
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Woman-Owned: Yes
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2006
Title: MEMS-Based Capacitive Pressure Sensors with Self-Calibration Capability
Agency / Branch: DOD / NAVY
Contract: N65538-06-M-0080
Award Amount: $70,000.00


In this proposal, Intelligent Automation Inc. (IAI) along with its subcontractor, Professor Lynn Fuller, from Rochester Institute of Technology, proposes to develop innovative sensor architectures, electronics, and software techniques to provide the pressure sensor with capabilities of built-in self-testing and undertaking wireless communication to transmit relevant data. This effort will result in the development of a miniature, low power, self-calibrating, wireless smart sensor system that will be suitable for monitoring the pressure of mechanized control systems in surface ships and submarines. The key innovation of our proposed approach lies in the novel design and development of a Micro-Electro-Mechanical-System (MEMS) based capacitive pressure sensor. The proposed design allows for an accurate electrostatic force to be generated and applied to the sensor's diaphragm, and the simultaneous precise measurement of the resulting displacement of the diaphragm caused as a result of the application of that force. This unique ability provides us the capability to assess a sensor's health by evaluating the changes in the diaphragm's mechanical properties that contribute to the drifts in the sensor's sensitivity and linearity. Advanced electric circuits and embedded real-time algorithms will be developed to implement optimal controls and accurate measurements for pressure readouts, sensor self-calibration, and wireless communications.

Principal Investigator:

Dan Xiang
Research Engineer

Business Contact:

Mark James
Contracts and Proposals Manager
Small Business Information at Submission:

15400 Calhoun Drive, Suite 400 Rockville, MD 20855

EIN/Tax ID: 521497192
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No