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TECHNIQUE FOR IN-SITU QUANTITATION OF DOPANTS AND MAJOR ELEMENT DURING EPILAYER…

Award Information

Agency:
Department of Defense 		Branch:
Army 		Award ID:
15137 		Program Year/Program:
1993 / SBIR
Agency Tracking Number:
15137 		Solicitation Year:
N/A 		Solicitation Topic Code:
N/A 		Solicitation Number:
N/A
Small Business Information
IONWERKS, INC.
3401 Louisiana St., Suite 355 HOUSTON, TX 77002
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1993
Title: TECHNIQUE FOR IN-SITU QUANTITATION OF DOPANTS AND MAJOR ELEMENT DURING EPILAYER GROWTH AND PROCESSING
Agency / Branch: DOD / ARMY
Contract: N/A
Award Amount: $499,094.00
 

Abstract:

A TECHNIQUE WILL BE DEMONSTRATED WHICH CAN PROVIDE ACCURATE AND QUANTIA TECHNIQUE WILL BE DEMONSTRATED WHICH CAN PROVIDE ACCURATE AND QUANTITATIVE ELEMENTAL ANALYSIS IN REAL TIME DURING EPILAYER GROWTH AND PROCTATIVE ELEMENTAL ANALYSIS IN REAL TIME DURING EPILAYER GROWTH AND PROCESSING. THE TECHNIQUE WILL WORK FOR ALL ELEMENTS IN THE PERIODIC TABLEESSING. THE TECHNIQUE WILL WORK FOR ALL ELEMENTS IN THE PERIODIC TABLE BUT WILL BE APPLIED TO THOSE TYPICALLY USED AS DOPANTS IN SILICON AND BUT WILL BE APPLIED TO THOSE TYPICALLY USED AS DOPANTS IN SILICON AND GAAS BASED SEMICONDUCTOR DEVICES. GAAS BASED SEMICONDUCTOR DEVICES.

Principal Investigator:

J Albert Schultz
Principal Investigator
7136671691

Business Contact:

Small Business Information at Submission:

Ionwerks
2215 Addison Houston, TX 77030

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No