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LARGE AREA NON-CONTAMINATING HIGH FLUX ATOMIC HYDROGEN SOURCE

Award Information

Agency:
Department of Defense
Branch:
Missile Defense Agency
Award ID:
25556
Program Year/Program:
1994 / SBIR
Agency Tracking Number:
25556
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
IONWERKS, INC.
3401 Louisiana St., Suite 355 HOUSTON, TX -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1994
Title: LARGE AREA NON-CONTAMINATING HIGH FLUX ATOMIC HYDROGEN SOURCE
Agency / Branch: DOD / MDA
Contract: N/A
Award Amount: $59,558.00
 

Abstract:

A new approach to generating atomic hydrogen (and possibly N and O) will give atomic fluxes of 10(-19) atoms/cm(-2) over a three inch wafer positioned three inches in front of the source. Scalt up to larger areas may be possible in phase II. We will examine the use of this source as an alternative to hot filament assisted generation of atomic H for diamond thin film growth. Use of the source for MBE epitaxy especially in Si/Ge systems may be possible particularly if metallic contamination of the film by the source is successfully minimized.

Principal Investigator:

J. Albert Schultz
7135229880

Business Contact:

Small Business Information at Submission:

Ionwerks
2472 Bolsover, Suite 255 Houston, TX 77005

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No