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SBIR Phase I: A Detector for Co-Axial Micro-focused Ion Beams for Detection of…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
91017
Program Year/Program:
2009 / SBIR
Agency Tracking Number:
0912355
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
IONWERKS, INC.
3401 Louisiana St., Suite 355 HOUSTON, TX -
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2009
Title: SBIR Phase I: A Detector for Co-Axial Micro-focused Ion Beams for Detection of Backscattered Ions and Secondary Electrons from semi-conducting surfaces
Agency: NSF
Contract: 0912355
Award Amount: $99,949.00
 

Abstract:

This Small Business Innovation Research Phase I project is to develop a secondary electron detector which can be co-axially mounted with a micro-focused ion beam. Backscattered neutral atoms (and ions) and secondary electrons will be analyzed to give a measure both of surface element location and identity. This detector will enable unique types of secondary ion mass spectrometry. The electrons and negative backscattered ions can be energy and time analyzed to give a spatially resolved elemental image of the surface under examination. Beam damage is greatly reduced compared to secondary electron microscopy allowing its use on biological samples. This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).

Principal Investigator:

Kelley Waters
PhD
7135229880
kelldawg@ionwerks.com

Business Contact:

Kelley Waters
PhD
7135229880
kelldawg@ionwerks.com
Small Business Information at Submission:

IONWERKS, INC
3401 Louisiana St. Suite 355 HOUSTON, TX 77002

EIN/Tax ID: 760589694
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No