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Semiconductor Microbolometer Room Temperature Infrared Detectors

Award Information

Agency:
Department of Defense
Branch:
Army
Award ID:
58024
Program Year/Program:
2002 / SBIR
Agency Tracking Number:
A012-1702
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Itn Energy Systems, Inc.
8130 Shaffer Parkway Littleton, CO 80127-4107
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2002
Title: Semiconductor Microbolometer Room Temperature Infrared Detectors
Agency / Branch: DOD / ARMY
Contract: DAAB07-02-C-J207
Award Amount: $119,666.00
 

Abstract:

"ITN Energy Systems, Inc. proposes the development of microbolometer room temperature infrared detectors using plasma enhanced chemical vapor deposition (PECVD) growth of silicon or silicon germanium alloys. This Phase I contract will see the demonstrationof PECVD deposited semiconductors with improved properties for microbolometer applications, especially reduced 1/f noise. Phase I will involve a parametric study of process conditions that yield a wide range of silicon film properties ranging fromamorphous to microcrystalline. Additional studies will examine silicon germanium alloys. Silicon micromachining techniques will be used in Phase II to produce sensor elements on an air bridge to enhance the sensitivity. The major goal of the proposed workis the development of room temperature detector arrays for the 3-5 and 8-12 micron wavelength bands. Affordable room temperature infrared detector arrays will have wide applicability in military night vision systems, as well as enabling wide spread civilian applications such as automotive night driving aids, security monitoring, and fire fighting."

Principal Investigator:

Russell Hollingsworth
Senior Scientist
3034039679
rhollingsworth@itnes.com

Business Contact:

John Stevens
President
3032851738
jstevens@itnes.com
Small Business Information at Submission:

Itn Energy Systems, Inc.
8130 Shaffer Pkwy Littleton, CO 80127

EIN/Tax ID: 841263359
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No