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ELECTRON CYCLOTRON RESONANCE (ECR) SEMICONDUCTOR ETCHING PROCESS CONTROL BY…

Award Information

Agency:
Department of Defense 		Branch:
Army 		Award ID:
18614 		Program Year/Program:
1992 / SBIR
Agency Tracking Number:
18614 		Solicitation Year:
N/A 		Solicitation Topic Code:
N/A 		Solicitation Number:
N/A
Small Business Information
J. A. Woollam Co., Inc.
645 M Street, Suite 102 Lincoln, NE 68508
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1992
Title: ELECTRON CYCLOTRON RESONANCE (ECR) SEMICONDUCTOR ETCHING PROCESS CONTROL BY ELLIPSOMETRY
Agency / Branch: DOD / ARMY
Contract: N/A
Award Amount: $50,000.00
 

Abstract:

N/A

Principal Investigator:

Blaine Johs
4024779116

Business Contact:

Small Business Information at Submission:

J.a. Woollam Company
650 J Street, Suite 39 Lincoln, NE 68508

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No